Micro Thermal Gas Mass Flowmeter

Micro Thermal Gas Mass Flowmeter
Mass measurement of very small gas flows, suited to laboratory and precision gas-dosing applications.
- Very low flow measurement
- Fast response, high sensitivity
- Compact structure
Overview
The HUALIU Micro Thermal Gas Mass Flowmeter uses a thermal flow sensor based on MEMS (micro-electro-mechanical systems) technology, designed specifically for the precise measurement and control of very small and low gas flows, enabling digital metering and control of micro-flows down to the ml/min level. The product is widely used in the light industry, chemical, environmental protection and semiconductor industries, and is applicable to the detection and control of air, oxygen, argon, nitrogen and many other gases. It is an ideal upgrade replacement for traditional flowmeters such as variable-area (rotameter) and orifice plate flowmeters.
Based on the thermal mass measuring principle, the product measures gas mass flow directly, without temperature or pressure compensation. The complete unit integrates instantaneous flow display, totalized flow display and signal output, and features high reliability, good repeatability, low pressure loss, no moving parts, a wide turndown ratio, fast response and high measuring accuracy. It also offers zero-point self-calibration, actual calibration for multiple gases and full-scale compensation, ensuring accurate and stable metering.
The HUALIU Micro Thermal Gas Mass Flowmeter supports 4-20mA and RS485 communication outputs, works with host computers for networked centralized management, and provides monitoring functions such as flow alarms. With a complete range of specifications and a wide span of ranges, it can be individually calibrated to user requirements, serving the micro gas flow measurement and control needs of research institutes, analytical instrumentation, semiconductors, photovoltaics, glass coating, petroleum and chemical, and related fields.
Specifications
| Nominal diameter (DN) | DN3, DN6, DN8, DN10 |
| Applicable media | All gases (except acetylene and gas mixtures) |
| Flow range | DN3: 30-300ml/min; DN6: 50-1000ml/min; DN8: 100-2000ml/min; DN10: 200-4000ml/min (medium: air, standard conditions 20℃, 101.325kPa; range can be extended) |
| Maximum permissible error | ±1.5%FS |
| Operating temperature | 0-55℃ |
| Ambient temperature | 0-55℃ |
| Operating pressure | 0.3MPa, 0.6MPa, 1.0MPa |
| Power supply | 24VDC |
| Output signal | 4-20mA, RS485 communication |
| Display digits | Instantaneous flow 3 digits, totalized flow 10 digits |
| Connection type | Quick coupling, flange |
| Probe type | Standard, Swagelok, user-specified |
| Material | 304 stainless steel, 316 stainless steel, 316L stainless steel, aluminum, etc. |
| Structure type | Mass Flow Meter (M), Mass Flow Controller (C) |
