华流仪表

Micro Thermal Gas Mass Flowmeter

Micro Thermal Gas Mass Flowmeter
Mass Flowmeters

Micro Thermal Gas Mass Flowmeter

Mass measurement of very small gas flows, suited to laboratory and precision gas-dosing applications.

Nominal diameter (DN)
DN3, DN6, DN8, DN10
Applicable media
All gases (except acetylene and gas mixtures)
Flow range
DN3: 30-300ml/min; DN6: 50-1000ml/min; DN8: 100-2000ml/min; DN10: 200-4000ml/min (medium: air, standard conditions 20℃, 101.325kPa; range can be extended)
Features
  • Very low flow measurement
  • Fast response, high sensitivity
  • Compact structure
ISO triple-system Ex-proof SIL2 CE Pattern approval

Overview

The HUALIU Micro Thermal Gas Mass Flowmeter uses a thermal flow sensor based on MEMS (micro-electro-mechanical systems) technology, designed specifically for the precise measurement and control of very small and low gas flows, enabling digital metering and control of micro-flows down to the ml/min level. The product is widely used in the light industry, chemical, environmental protection and semiconductor industries, and is applicable to the detection and control of air, oxygen, argon, nitrogen and many other gases. It is an ideal upgrade replacement for traditional flowmeters such as variable-area (rotameter) and orifice plate flowmeters.

Based on the thermal mass measuring principle, the product measures gas mass flow directly, without temperature or pressure compensation. The complete unit integrates instantaneous flow display, totalized flow display and signal output, and features high reliability, good repeatability, low pressure loss, no moving parts, a wide turndown ratio, fast response and high measuring accuracy. It also offers zero-point self-calibration, actual calibration for multiple gases and full-scale compensation, ensuring accurate and stable metering.

The HUALIU Micro Thermal Gas Mass Flowmeter supports 4-20mA and RS485 communication outputs, works with host computers for networked centralized management, and provides monitoring functions such as flow alarms. With a complete range of specifications and a wide span of ranges, it can be individually calibrated to user requirements, serving the micro gas flow measurement and control needs of research institutes, analytical instrumentation, semiconductors, photovoltaics, glass coating, petroleum and chemical, and related fields.

Specifications

Nominal diameter (DN)DN3, DN6, DN8, DN10
Applicable mediaAll gases (except acetylene and gas mixtures)
Flow rangeDN3: 30-300ml/min; DN6: 50-1000ml/min; DN8: 100-2000ml/min; DN10: 200-4000ml/min (medium: air, standard conditions 20℃, 101.325kPa; range can be extended)
Maximum permissible error±1.5%FS
Operating temperature0-55℃
Ambient temperature0-55℃
Operating pressure0.3MPa, 0.6MPa, 1.0MPa
Power supply24VDC
Output signal4-20mA, RS485 communication
Display digitsInstantaneous flow 3 digits, totalized flow 10 digits
Connection typeQuick coupling, flange
Probe typeStandard, Swagelok, user-specified
Material304 stainless steel, 316 stainless steel, 316L stainless steel, aluminum, etc.
Structure typeMass Flow Meter (M), Mass Flow Controller (C)

Applications

Laboratory gas metering
Precision gas dosing / blending

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